AZ - 1518 Photoresist Analysis with Synchrotron Radiation using High-Resolution Time-of-Flight Mass Spectrometry

Título: 
AZ - 1518 Photoresist Analysis with Synchrotron Radiation using High-Resolution Time-of-Flight Mass Spectrometry
Ano: 
2007
DOI: 
10.1016/j.polymdegradstab.2007.03.011
ISSN: 
01413910
Home: 
[http://www.sciencedirect.com/science?_ob=articleurl&_udi=b6txs-4n9p4pg-2&_user=10&_coverdate=06%2f30%2f2007&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c&_acct=c000050221&_version=1&_urlversion=0&_userid=10&md5=c5dea1228d2881dae9fb2a26f918874a][doi:10.1016/j.polymdegradstab.2007.03.011]
Idioma: 
Inglês