Título: RBS, ERDA and NR analyses of hard amorphous nitrogen-incorporated carbon filmsAutor: Dante Ferreira Franceschini FilhoAno: 1994Idioma: InglêsDOI: 10.1016/0168-583X(94)95825-4Revista: Nuclear Instruments & Methods in Physics Research. Section BBeam Interactions with Materials and Atoms (Print)ISSN: 0168583XTags: ERDAnitreto de carbono amorfoRBS