Acoustic electromechanical energy loss mechanism for suspended micro- and nanoelectromechanical resonators

Título: 
Acoustic electromechanical energy loss mechanism for suspended micro- and nanoelectromechanical resonators
Autor: 
Ano: 
2010
Idioma: 
Inglês
DOI: 
10.1063/1.3428786
ISSN: 
36951
Home: 
http://apl.aip.org/applab/v96/i19/p193504_s1